Ready ceramic plate breaks up into individual workpieces, which
are used in the manufacturing of gas sensors sensitive elements.
From the substrate, size of 48×60 mm, can be obtained up to 75
chips of size 6×6 mm.
Proposed microhotplates are good
prefabricated for manufacturing
of various sensing devices, such as gas concentration sensors,
pressure gauges, gas flow detectors, fast-acting thermometers,